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Laboratory of wet etching of silicon-compatible materials
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Laboratory of high temperature processes of silicon-compatible materials
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Laboratory of photolithography of silicon-compatible materials
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Laboratory of photolithography of silicon-compatible materials
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Laboratory of plasma technologies of silicon-compatible materials
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Laboratory of nanolithography
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Laboratory of nanolithography
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Laboratory of ion implantation
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Laboratory of ion implantation
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Laboratory of bio-med-chem diagnostics
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Technical infrastructure
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DI water station
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